SIOM OpenIR  > 精密光电测控研究与发展中心
步进扫描投影光刻机工件台和掩模台的进展
Alternative TitleProess of Wafer Stage and Reticle Stage for Step-and Scan-Lithography System
刘丹; 程兆谷; 高海军; 黄惠杰; 赵全忠; 谌巍
2003
Source Publication激光与光电子学进展
Volume40Issue:5Pages:14
Abstract着重介绍了当前国外步进扫描投影光刻机的工件台和掩模台的发展状况,并对套刻精度和整机精度进行了分析。
SubtypeReview
Other AbstractRecent progress in technology of wafer stage and reticle stage used in step-and-scan lithography system is introduced, and the overlay accuracy and the accuracy of the overall system are analyzed.
Indexed ByCSCD
Language中文
CSCD IDCSCD:1201867
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18294
Collection精密光电测控研究与发展中心
Affiliation1.Liu Dan, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
2.Cheng Zhaoyu, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
3.Gao Haijun, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
4.Huang Huijie, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
5.Zhao Quanzhong, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
6.Shen Wei, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
Recommended Citation
GB/T 7714
刘丹,程兆谷,高海军,等. 步进扫描投影光刻机工件台和掩模台的进展[J]. 激光与光电子学进展,2003,40(5):14.
APA 刘丹,程兆谷,高海军,黄惠杰,赵全忠,&谌巍.(2003).步进扫描投影光刻机工件台和掩模台的进展.激光与光电子学进展,40(5),14.
MLA 刘丹,et al."步进扫描投影光刻机工件台和掩模台的进展".激光与光电子学进展 40.5(2003):14.
Files in This Item:
File Name/Size DocType Version Access License
306.pdf(1743KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[刘丹]'s Articles
[程兆谷]'s Articles
[高海军]'s Articles
Baidu academic
Similar articles in Baidu academic
[刘丹]'s Articles
[程兆谷]'s Articles
[高海军]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[刘丹]'s Articles
[程兆谷]'s Articles
[高海军]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.