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AgO_x掩膜的制备和性能研究
Alternative TitlePreparation and properties investigation of AgO_x mask films
张约品; 阮昊; 沈德芳; 干福熹
2003
Source Publication功能材料
Volume34Issue:2Pages:156
Abstract磁控反应溅射制备了AgOx掩膜,用聚焦激光热效应装置测得的光透过特性,分析了AgOx掩膜的开关性能。结果表明,AgOx掩膜在较低的温度作用下有良好的开关性能,反应AgOx Ag+O2可逆,适用于LSC-super-REMS光盘。用X-ray和TEM分析了热处理后的AgOx薄膜的成分结构,表明200℃热处理AgOx掩膜存在的纳米量级Ag颗粒。
SubtypeArticle
Other AbstractIn this work AgOx mask films for super resolution near-field structure application were prepared by reactive sputtering. The switch properties of AgOx mask films were analyzed by the transmittance property measured by the focused laser thermal effect exper imental scheme. Results indicated that the mask films AgOx had excellent switch properties at low temperature, the reaction AgOx? Ag+O_2 was reversible, and the mask films were suitable for using in LSC-super-RENS disk. The composition and structure were in vestigated by X-ray diffraction spectrum and TEM. The results give out that the 200℃ calcined AgOx layers have silver nanometer , grains for near-field scattering center.
Funding Organization国家自然科学基金重点资助项目(59832060) ; 国家重点基础研究发展计划(973计划)资助项目(19990330) ; 国家自然科学基金重点资助项目(59832060) ; 国家重点基础研究发展计划(973计划)资助项目(19990330)
Indexed ByCSCD
Language中文
Funding Organization国家自然科学基金重点资助项目(59832060) ; 国家重点基础研究发展计划(973计划)资助项目(19990330) ; 国家自然科学基金重点资助项目(59832060) ; 国家重点基础研究发展计划(973计划)资助项目(19990330)
CSCD IDCSCD:1308725
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18189
Collection高密度光存储技术实验室
Affiliation1.Zhang Yuepin, Shanghai Institute of Opties and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China.
2.Ruan Hao, Shanghai Institute of Opties and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China.
3.Shen Defang, Shanghai Institute of Opties and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China.
4.Gan Fuxi, Shanghai Institute of Opties and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China.
Recommended Citation
GB/T 7714
张约品,阮昊,沈德芳,等. AgO_x掩膜的制备和性能研究[J]. 功能材料,2003,34(2):156.
APA 张约品,阮昊,沈德芳,&干福熹.(2003).AgO_x掩膜的制备和性能研究.功能材料,34(2),156.
MLA 张约品,et al."AgO_x掩膜的制备和性能研究".功能材料 34.2(2003):156.
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