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准分子激光刻蚀聚合物微图形制作研究
Alternative TitleMicropatterns on polymers etched by excimer lasers
章琳; 楼祺洪; 魏远荣; 董景星; 李铁军; 黄峰
2002
Source Publication激光技术
Volume26Issue:2Pages:94
Abstract主要描述了紫外准分子激光刻蚀聚酰亚胺(polyimide,PI)制作微图案实验。通过这种刻蚀方法,成功地在PI上制作了微米量级线宽和亚微米量级深度的图案。
SubtypeArticle
Other AbstractIn the paper, the experiment with UV excimer laser etching PI for micropatterns is described in detail. With this method, micropatterns with micron-scale line-width and sub-micron depth have been successfully fabricated on PI.
Indexed ByCSCD
Language中文
CSCD IDCSCD:1016791
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18039
Collection先进激光技术与应用系统实验室
Affiliation1.章琳, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
2.楼祺洪, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
3.魏远荣, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
4.董景星, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
5.李铁军, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
6.黄峰, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
Recommended Citation
GB/T 7714
章琳,楼祺洪,魏远荣,等. 准分子激光刻蚀聚合物微图形制作研究[J]. 激光技术,2002,26(2):94.
APA 章琳,楼祺洪,魏远荣,董景星,李铁军,&黄峰.(2002).准分子激光刻蚀聚合物微图形制作研究.激光技术,26(2),94.
MLA 章琳,et al."准分子激光刻蚀聚合物微图形制作研究".激光技术 26.2(2002):94.
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