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Alternative TitleOptical Constants of Laser-Induced Crystalline Ge_2Sb_2Te_5 Phase-Change Media
刘波; 阮昊; 干福熹
Source Publication半导体学报
Other AbstractThe effects of crystallization fraction on the optical constants of Ge_2Sb_2Te_5 phase-change films are studied using spectroscopic ellipsometer and spectrometer. With fixed initialization velocity, the refractive index and transmissivity decrease while the extinction coefficient increases when the laser power increases. With fixed initialization laser power, the refractive index and transmissivity increase and the extinction coefficient decreases when the initialization velocity increases. The change between amorphous phase and crystalline phase, the changes in microstructure (including change in bonding state) and the internal residual stresses in film are the main factors that affect the complex refractive index of Ge_2Sb_2Te_5 phase-change film. The reflection spectra of the Ge_2Sb_2Te_5 film in CD-RW (compact disk rewritable) phase-change optical disk at amorphous and crystalline states are also measured.
Funding Organization上海应用物理中心 ; 国家自然科学基金(No. 59832060)资助项目 ; 上海应用物理中心 ; 国家自然科学基金(No. 59832060)资助项目
Indexed ByCSCD
Funding Organization上海应用物理中心 ; 国家自然科学基金(No. 59832060)资助项目 ; 上海应用物理中心 ; 国家自然科学基金(No. 59832060)资助项目
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Document Type期刊论文
Affiliation1.刘波, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
2.阮昊, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
3.干福熹, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
Recommended Citation
GB/T 7714
刘波,阮昊,干福熹. 激光致晶态Ge_2Sb_2Te_5相变介质的光学常数[J]. 半导体学报,2002,23(5):479.
APA 刘波,阮昊,&干福熹.(2002).激光致晶态Ge_2Sb_2Te_5相变介质的光学常数.半导体学报,23(5),479.
MLA 刘波,et al."激光致晶态Ge_2Sb_2Te_5相变介质的光学常数".半导体学报 23.5(2002):479.
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