SIOM OpenIR  > 高密度光存储技术实验室
光盘反射层纳米Al膜性能研究
Alternative TitleThe Characteristics of Al Nano-films Used as Optical Disk Reflective Layer
刘波; 阮昊; 干福熹
2002
Source Publication光电子·激光
Volume13Issue:10Pages:987
Abstract利用原子力显微镜(AFM)和椭圆偏振仪研究了溅射条件对纳米Al薄膜性能的影响。研究表明,随溅射Ar气压的增大,纳米Al膜的表面粗糙度增加,折射率降低,反射率减少,这与薄膜的结构变化密切相关;随溅射功率的增大,纳米Al膜的表面粗糙度增加,而其光学常数的变化则不明显。
SubtypeArticle
Other AbstractThe characteristics of Al nano-film were studied by using AFM and spectroscopic ellipsometer methods. It was indicated that the surface roughness of sputtered Al nano-film, from 1.216 nm (rms) at 0.4 Pa to 3.521 nm at 1.6 Pa, is proportional to the sputtering Ar pressure. The refractive index, extinction coefficient and reflectivity of Al nano-film all decrease as the sputtering Ar pressure increases. The above phenomenon is related to the change of Al nano-film structure. In most cases, the reflectivity of Al nano-film is more than 85%. It was also indicated that the surface roughness of sputtered Al nano-film increases when the sputtering power increases, from 0.486 nm at 1000 W changing to 2.014 nm at 2500 W. However the optical constants of Al nano-film are not sensitive to the sputtering power.
Funding Organization国家自然科学基金资助项目(5983060) ; 上海应用物理中心资助项目 ; 国家自然科学基金资助项目(5983060) ; 上海应用物理中心资助项目
Indexed ByCSCD
Language中文
Funding Organization国家自然科学基金资助项目(5983060) ; 上海应用物理中心资助项目 ; 国家自然科学基金资助项目(5983060) ; 上海应用物理中心资助项目
CSCD IDCSCD:1021358
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/17973
Collection高密度光存储技术实验室
Affiliation1.刘波, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
2.阮昊, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
3.干福熹, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
Recommended Citation
GB/T 7714
刘波,阮昊,干福熹. 光盘反射层纳米Al膜性能研究[J]. 光电子·激光,2002,13(10):987.
APA 刘波,阮昊,&干福熹.(2002).光盘反射层纳米Al膜性能研究.光电子·激光,13(10),987.
MLA 刘波,et al."光盘反射层纳米Al膜性能研究".光电子·激光 13.10(2002):987.
Files in This Item:
File Name/Size DocType Version Access License
光盘反射层纳米Al膜性能研究.pdf(188KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[刘波]'s Articles
[阮昊]'s Articles
[干福熹]'s Articles
Baidu academic
Similar articles in Baidu academic
[刘波]'s Articles
[阮昊]'s Articles
[干福熹]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[刘波]'s Articles
[阮昊]'s Articles
[干福熹]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.