| 光盘反射层纳米Al膜性能研究 | |
| Alternative Title | The Characteristics of Al Nano-films Used as Optical Disk Reflective Layer |
| 刘波; 阮昊; 干福熹 | |
| 2002 | |
| Source Publication | 光电子·激光
 |
| Volume | 13Issue:10Pages:987 |
| Abstract | 利用原子力显微镜（AFM）和椭圆偏振仪研究了溅射条件对纳米Al薄膜性能的影响。研究表明，随溅射Ar气压的增大，纳米Al膜的表面粗糙度增加，折射率降低，反射率减少，这与薄膜的结构变化密切相关；随溅射功率的增大，纳米Al膜的表面粗糙度增加，而其光学常数的变化则不明显。 |
| Subtype | Article |
| Other Abstract | The characteristics of Al nano-film were studied by using AFM and spectroscopic ellipsometer methods. It was indicated that the surface roughness of sputtered Al nano-film, from 1.216 nm (rms) at 0.4 Pa to 3.521 nm at 1.6 Pa, is proportional to the sputtering Ar pressure. The refractive index, extinction coefficient and reflectivity of Al nano-film all decrease as the sputtering Ar pressure increases. The above phenomenon is related to the change of Al nano-film structure. In most cases, the reflectivity of Al nano-film is more than 85%. It was also indicated that the surface roughness of sputtered Al nano-film increases when the sputtering power increases, from 0.486 nm at 1000 W changing to 2.014 nm at 2500 W. However the optical constants of Al nano-film are not sensitive to the sputtering power. |
| Funding Organization | 国家自然科学基金资助项目（5983060） ; 上海应用物理中心资助项目 ; 国家自然科学基金资助项目（5983060） ; 上海应用物理中心资助项目 |
| Indexed By | CSCD |
| Language | 中文 |
| Funding Organization | 国家自然科学基金资助项目（5983060） ; 上海应用物理中心资助项目 ; 国家自然科学基金资助项目（5983060） ; 上海应用物理中心资助项目 |
| CSCD ID | CSCD:1021358 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Version | 出版稿 |
| Identifier | http://ir.siom.ac.cn/handle/181231/17973 |
| Collection | 高密度光存储技术实验室 |
| Affiliation | 1.刘波, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. 2.阮昊, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. 3.干福熹, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. |
| Recommended Citation GB/T 7714 | 刘波,阮昊,干福熹. 光盘反射层纳米Al膜性能研究[J]. 光电子·激光,2002,13(10):987. |
| APA | 刘波,阮昊,&干福熹.(2002).光盘反射层纳米Al膜性能研究.光电子·激光,13(10),987. |
| MLA | 刘波,et al."光盘反射层纳米Al膜性能研究".光电子·激光 13.10(2002):987. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 光盘反射层纳米Al膜性能研究.pdf（188KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | Application Full Text | |
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