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Alternative TitleA Laser Diode Interferometer with a Feedback Control System for REal-time Micro-vibration Measurements
宋松; 王向朝; 王学锋; 钱锋; 陈高庭
Source Publication中国激光
Other AbstractA laser diode interferometer with a feedback control system for micro-vibration measurement is proposed. The interferometer can be used to measure micro-vibration of an object with high accuracy in real-time. The interference signal is processed with a simple signal processing system and the amplitude and frequency of the vibration are obtained. The measurement errors are decreased with a feedback system. The theoretical analysis and experimental results are given.
Funding Organization国家自然科学基金(编号:69978024) ; 上海市应用材料研究与发展基金资助项目 ; 国家自然科学基金(编号:69978024) ; 上海市应用材料研究与发展基金资助项目
Indexed ByEI
Funding Organization国家自然科学基金(编号:69978024) ; 上海市应用材料研究与发展基金资助项目 ; 国家自然科学基金(编号:69978024) ; 上海市应用材料研究与发展基金资助项目
Document Type期刊论文
Affiliation1.宋松, 中国科学院上海光学精密机械研究所信息光学研究实验室, 上海 201800, 中国.
2.王向朝, 中国科学院上海光学精密机械研究所信息光学研究实验室, 上海 201800, 中国.
3.王学锋, 中国科学院上海光学精密机械研究所信息光学研究实验室, 上海 201800, 中国.
4.钱锋, 中国科学院上海光学精密机械研究所信息光学研究实验室, 上海 201800, 中国.
5.陈高庭, 中国科学院上海光学精密机械研究所信息光学研究实验室, 上海 201800, 中国.
Recommended Citation
GB/T 7714
宋松,王向朝,王学锋,等. 半导体激光微小振动实时反馈式干涉测量仪[J]. 中国激光,2002,29(5):402.
APA 宋松,王向朝,王学锋,钱锋,&陈高庭.(2002).半导体激光微小振动实时反馈式干涉测量仪.中国激光,29(5),402.
MLA 宋松,et al."半导体激光微小振动实时反馈式干涉测量仪".中国激光 29.5(2002):402.
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V29-5-402.pdf(178KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
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