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Alternative TitlePrecise Calculation of the Periodic-thickness for Multilayer
冯仕猛; 赵海鹰; 窦晓鸣; 范正修; 邵建达
Source Publication中国激光
Other AbstractThe amendatory Bragg formula may be used for calculating the periodic thickness of multlayers deposited on the plane substrate by small X-ray diffraction spectrum. However, the diffraction peak angle of multilayer deposited on the curved substrate will be different from that of multilayer fabricated on the plane substrates though they have the same periodic thickness. Thus, the calculated periodic thickness of the above multilayer with the Bragg formula is not well agreement with the real value of the multilayer. This paper gives an analysis of phenomenon of diffraction peak excursion, and gives a revised formula derived from the amendatory Bragg formula for accurately calculating the periodic thickness of multilayer deposited on any substrates. The experimental results show that the periodic thickness calculated with the formula is consistent with the practical periodic thickness.
Indexed ByEI
Document Type期刊论文
Affiliation1.冯仕猛, 上海交通大学应用物理系, 上海 200240, 中国.
2.赵海鹰, 上海交通大学应用物理系, 上海 200240, 中国.
3.窦晓鸣, 上海交通大学应用物理系, 上海 200240, 中国.
4.范正修, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
5.邵建达, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
Recommended Citation
GB/T 7714
冯仕猛,赵海鹰,窦晓鸣,等. 多层膜周期厚度的精确计算[J]. 中国激光,2002,29(11):1027.
APA 冯仕猛,赵海鹰,窦晓鸣,范正修,&邵建达.(2002).多层膜周期厚度的精确计算.中国激光,29(11),1027.
MLA 冯仕猛,et al."多层膜周期厚度的精确计算".中国激光 29.11(2002):1027.
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V29-11-1027.pdf(116KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
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