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Alternative TitleSoft X-Ray Contact Microscopy by an Atomic Force Microscope
蒋诗平; 张玉烜; 高鸿奕; 陈建文; 张新夷; 徐至展
Source Publication光学学报
Other AbstractThe instruments for reading relief in the photoresist related with the resolutions of soft X-ray contact microimaging are described. Comparing the micrographs made by an atomic force microscope with that by optical microscopes experimentally, the conclusion can be drawn that the atomic force microscope is a very good method for amplifying the images in the resists.
Funding Organization国家自然科学基金(19655001) ; 合肥国家同步辐射实验室开放基金 ; 国家自然科学基金(19655001) ; 合肥国家同步辐射实验室开放基金
Indexed ByEI
Funding Organization国家自然科学基金(19655001) ; 合肥国家同步辐射实验室开放基金 ; 国家自然科学基金(19655001) ; 合肥国家同步辐射实验室开放基金
Document Type期刊论文
Affiliation1.蒋诗平, 中国科学技术大学, 国家同步辐射实验室, 合肥, 安徽 230029, 中国.
2.张新夷, 中国科学技术大学, 国家同步辐射实验室, 合肥, 安徽 230029, 中国.
3.张玉烜, 复旦大学物理系, 上海 200433, 中国.
4.高鸿奕, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
5.陈建文, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
6.徐至展, 中国科学院上海光学精密机械研究所, 上海 201800, 中国.
Recommended Citation
GB/T 7714
蒋诗平,张玉烜,高鸿奕,等. 原子力显微镜用于软X射线接触成像的研究[J]. 光学学报,2002,22(1):118.
APA 蒋诗平,张玉烜,高鸿奕,陈建文,张新夷,&徐至展.(2002).原子力显微镜用于软X射线接触成像的研究.光学学报,22(1),118.
MLA 蒋诗平,et al."原子力显微镜用于软X射线接触成像的研究".光学学报 22.1(2002):118.
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V22-1-118.pdf(94KB)期刊论文作者接受稿开放获取CC BY-NC-SAApplication Full Text
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