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Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range
Feng, SM; Zhu, GL; Shao, JD; Yi, K; Fan, ZX; Dou, XM; Feng, SM (reprint author), Shanghai Jiao Tong Univ, Dept Phys, Shanghai 200030, Peoples R China.
2002
Source PublicationAppl. Phys. A-Mater. Sci. Process.
Volume74Issue:4Pages:553
AbstractWe deposited Co/C multilayer mirrors for a wavelength of 4.77 nm and W/Si multilayer mirrors for a wavelength of 1.77 nm by use of ion-beam sputtering. The small-angle diffraction spectrum was used to analyze the structure of the multilayers. With a combination of the experimental diffraction spectra and Apeles' theory for calculation of the interfacial roughnesses of the multilayers, the interfacial roughnesses of Co/C and W/Si are 0.80 nm and 0.60 nm, respectively, which are lower than that of the substrate. The reflectivity of the Co/C multilayer is measured to be about 20% and that of the W/Si multilayer about 1% at the grazing incidence angle of about 12degrees.
SubtypeArticle
DOI10.1007/s003390000695
Indexed BySCI
Language英语
WOS IDWOS:000174673300019
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/17734
Collection光学薄膜技术研究与发展中心
Corresponding AuthorFeng, SM (reprint author), Shanghai Jiao Tong Univ, Dept Phys, Shanghai 200030, Peoples R China.
Affiliation1.Shanghai Jiao Tong Univ, Dept Phys, Shanghai 200030, Peoples R China
2.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai, Peoples R China
Recommended Citation
GB/T 7714
Feng, SM,Zhu, GL,Shao, JD,et al. Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range[J]. Appl. Phys. A-Mater. Sci. Process.,2002,74(4):553.
APA Feng, SM.,Zhu, GL.,Shao, JD.,Yi, K.,Fan, ZX.,...&Feng, SM .(2002).Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range.Appl. Phys. A-Mater. Sci. Process.,74(4),553.
MLA Feng, SM,et al."Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range".Appl. Phys. A-Mater. Sci. Process. 74.4(2002):553.
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