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题名:
Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration
作者: Liao, Yang; Cheng, Ya; Liu, Changning; Song, Jiangxin; He, Fei; Shen, Yinglong; Chen, Danping; Xu, Zhizhan; Fan, Zhichao; Wei, Xunbin; Sugioka, Koji; Midorikawa, Katsumi
通讯作者: Liao, Y (reprint author), Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China.
刊名: Lab Chip
发表日期: 2013
DOI: 10.1039/c3lc41171k
卷: 13, 期:8, 页:1626
文章类型: Article
收录类别: SCI
英文摘要: We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e. g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.
语种: 英语
项目资助者: National Basic Research Program of China [2011CB808100] ; National Natural Science Foundation of China [60825406, 61108015]
Citation statistics:
内容类型: 期刊论文
版本: 出版稿
URI标识: http://ir.siom.ac.cn/handle/181231/14669
Appears in Collections:强场激光物理国家重点实验室_期刊论文

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作者单位: 1.[Liao, Yang
2.Cheng, Ya
3.Liu, Changning
4.Song, Jiangxin
5.He, Fei
6.Shen, Yinglong
7.Chen, Danping
8.Xu, Zhizhan] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
9.[Fan, Zhichao
10.Wei, Xunbin] Shanghai Jiao Tong Univ, Med X Res Inst, Shanghai 200030, Peoples R China
11.[Fan, Zhichao
12.Wei, Xunbin] Shanghai Jiao Tong Univ, Sch Biomed Engn, Shanghai 200030, Peoples R China
13.[Sugioka, Koji
14.Midorikawa, Katsumi] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

Recommended Citation:
Liao, Yang,Cheng, Ya,Liu, Changning,et al. Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration[J]. Lab Chip,2013,13(8):1626.
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